DocumentCode :
3333658
Title :
Micro electret power generator
Author :
Boland, Justin ; Chao, Yuan-Heng ; Suzuki, Yuji ; Tai, Y.C.
Author_Institution :
Dept. of Electr. Eng., California Inst. of Technol., Pasadena, CA, USA
fYear :
2003
fDate :
19-23 Jan. 2003
Firstpage :
538
Lastpage :
541
Abstract :
We present the first micromachined rotational electret power generator, linearized theoretical model of electret power generation, and novel method to produce uniformly charged electret. We also improved our previously developed (1996, 1999) thin film Teflon AF 1601-S electret technology with respect to dielectric thickness, charge uniformity, and processability. In demonstration, our prototype power generator successfully generated > 25μW with electret thickness of 9μm, effective charge density of -2.8×10-4C/m2, and rotational speed of 4170RPM.
Keywords :
electrets; electric generators; small electric machines; 25 muW; 9 micron; charge uniformity; dielectric thickness; linearized theoretical model; micro electret power generator; micromachined rotational electret power generator; processability; thin film Teflon AF 1601-S electret technology; Aluminum; Chaos; Dielectric thin films; Electrets; Micromechanical devices; Power generation; Rotors; Rough surfaces; Stators; Surface roughness;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
ISSN :
1084-6999
Print_ISBN :
0-7803-7744-3
Type :
conf
DOI :
10.1109/MEMSYS.2003.1189805
Filename :
1189805
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3333658
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