Title :
30 μm-pitch stripes of OLED patterned by stamping lift-off method
Author :
Hasegawa, Takashi ; Matsumoto, Kiyoshi ; Shimoyama, Isao
Author_Institution :
Dept. of Mechano-Informatics, Univ. of Tokyo, Japan
Abstract :
In this paper, we demonstrate 30 μm-pitch OLED (Organic Light Emitting Diode) stripes, whose cathode was patterned by a lift-off method and selectively addressable. The OLED consists of ITO (120 nm) - αNPD (70 nm)-Alq3 (70 nm)-Al (20 nm)-Au (1 nm) layers on a glass wafer (12 mm×12 mm×0.5 mm). A 2 μm-high convex stamp of the electrode pattern was formed from a Si-wafer by dry-etching, and it was pressed on the unpatterned surface of the OLED metal layer. The unwanted metal was removed because the metal layer was adhered to the convex of the Si-stamp, and a fine cathode pattern was formed.
Keywords :
nanotechnology; organic light emitting diodes; pattern formation; sputter etching; αNPD; 0.5 mm; 1 nm; 12 mm; 120 nm; 2 micron; 20 nm; 30 μm-pitch stripes; 30 micron; 70 nm; Al layers; Alq3; Au layers; ITO; OLED; Si-wafer; dry-etching; electrode pattern; fine cathode pattern; glass wafer; selectively addressable; stamping lift-off method patterning; unpatterned surface; Anodes; Artificial intelligence; Cathodes; Electrodes; Fabrication; Gold; Information science; Organic light emitting diodes; Organic materials; Surface cleaning;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189807