Title :
Fabrication of 3D microstructures with inclined/rotated UV lithography
Author :
Han, Manhee ; Woonseob Lee ; Sung-Keun Lee ; Lee, Seung S.
Author_Institution :
Dept. of Mech. Eng., Pohang Univ. of Sci. & Technol., South Korea
Abstract :
This paper presents a novel microfabrication technology of three-dimensional (3D) microstructures with inclined/rotated UV lithography. Various 3D microstructures have been made of negative thick photoresist, SU-8, using single inclined, double inclined, or inclined & rotated UV lithography. In some cases, we also exploit the UV reflected by the substrate as well as the incident UV from the source to form various microstructures. With the 3D microfabrication technology, various 3D microstructures are simply and easily fabricated such as oblique cylinders, embedded channels, bridges, V-grooves, truncated cones, and so on.
Keywords :
micromachining; nanolithography; ultraviolet lithography; 3D microstructures fabrication; SU-8; V-grooves; bridges; double inclined lithography; embedded channels; inclined/rotated UV lithography; negative thick photoresist; oblique cylinders; single inclined lithography; truncated cones; Bridges; Engine cylinders; Fabrication; Mechanical engineering; Micromachining; Microstructure; Optical devices; Resists; Silicon compounds; X-ray lithography;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189809
