Title :
Three-dimensional MMIC technology and application to millimeter-wave MMICs
Author :
Tokumitsu, T. ; Nishikawa, K. ; Karnogawa, K. ; Toyoda, I. ; Nishimura, Kosuke
Author_Institution :
NTT Wireless Syst. Labs., Yokosuka, Japan
Abstract :
Three-dimensional MMIC is a significantly promising technology for accurate and easy design and low-cost fabrication of millimeter-wave MMICs. Passive circuit components and amplifiers in the 50 and 60-GHz bands are demonstrated
Keywords :
MESFET integrated circuits; MIMIC; MMIC amplifiers; integrated circuit design; integrated circuit technology; 3D MMIC technology; 50 to 60 GHz; EHF; MIMIC design; amplifiers; low-cost fabrication; millimeter-wave MMICs; passive circuit components; three-dimensional MMIC; Conductive films; FETs; Frequency; Laboratories; MMICs; Microstrip; Millimeter wave circuits; Millimeter wave technology; Passive circuits; Polyimides;
Conference_Titel :
Millimeter Waves, 1997 Topical Symposium on
Conference_Location :
Kanagawa
Print_ISBN :
0-7803-3887-1
DOI :
10.1109/TSMW.1997.702464
