3D fabrication using deep X-ray mask with integrated micro-actuator

This paper describes a novel 3D fabrication method with single X-ray process utilizing a deep X-ray mask in which a micro-actuator is integrated. An X-ray absorber is electroplated on the shuttle mass driven by the integrated micro-actuator during deep X-ray exposures. 3D X-ray resist microstructures are revealed according to the in-depth dose distribution modulated by the shuttle mass motion and the resist development kinetics. Fabrication of two kinds of the X-ray exposure devices, electrostatically driven and electrothermally driven devices, and discussions on X-ray experiments are presented. S-shaped and conical shaped PMMA microstructures are fabricated with the devices.