Title :
A 600 kHz electrically-coupled MEMS bandpass filter
Author :
Pourkamali, Siavash ; Abdolvand, Reza ; Ayazi, Farrokh
Author_Institution :
Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA
Abstract :
This paper presents a 600 kHz MEMS bandpass filter implemented using electrical coupling of single crystal silicon HARPSS micromechanical resonators. Passive and active filter synthesis approaches based on electrical coupling of capacitive MEMS resonators are introduced and discussed. A third order passive bandpass filter at the center frequency of 600 kHz with a bandwidth of 125 Hz, a stopband rejection of 48 dB, and a 20 dB-shape-factor of 2.1 is demonstrated. A quality factor (Q) enhancement technique based on active electrical cascading of the resonators is also presented. A 3-stage active cascade at 600 kHz demonstrated a 2× increase in the effective Q.
Keywords :
Q-factor; active filters; band-pass filters; frequency response; micromechanical devices; passive filters; 125 Hz; 3-stage active cascade; 600 kHz; 600 kHz electrically-coupled MEMS bandpass filter; Si; active electrical cascading; active filter synthesis; micromechanical resonators; passive filter synthesis; third order passive bandpass filter; Active filters; Band pass filters; Capacitors; Coupling circuits; Electrodes; Frequency; Micromechanical devices; Optical filters; Optical resonators; Resonator filters;
Conference_Titel :
Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on
Print_ISBN :
0-7803-7744-3
DOI :
10.1109/MEMSYS.2003.1189846
