A 600 kHz electrically-coupled MEMS bandpass filter

Author

Pourkamali, Siavash ; Abdolvand, Reza ; Ayazi, Farrokh

Author_Institution

Sch. of Electr. & Comput. Eng., Georgia Inst. of Technol., Atlanta, GA, USA

fYear

2003

fDate

19-23 Jan. 2003

Firstpage

702

Lastpage

705

Abstract

This paper presents a 600 kHz MEMS bandpass filter implemented using electrical coupling of single crystal silicon HARPSS micromechanical resonators. Passive and active filter synthesis approaches based on electrical coupling of capacitive MEMS resonators are introduced and discussed. A third order passive bandpass filter at the center frequency of 600 kHz with a bandwidth of 125 Hz, a stopband rejection of 48 dB, and a 20 dB-shape-factor of 2.1 is demonstrated. A quality factor (Q) enhancement technique based on active electrical cascading of the resonators is also presented. A 3-stage active cascade at 600 kHz demonstrated a 2× increase in the effective Q.

Keywords

Q-factor; active filters; band-pass filters; frequency response; micromechanical devices; passive filters; 125 Hz; 3-stage active cascade; 600 kHz; 600 kHz electrically-coupled MEMS bandpass filter; Si; active electrical cascading; active filter synthesis; micromechanical resonators; passive filter synthesis; third order passive bandpass filter; Active filters; Band pass filters; Capacitors; Coupling circuits; Electrodes; Frequency; Micromechanical devices; Optical filters; Optical resonators; Resonator filters;

fLanguage

English

Publisher

ieee

Conference_Titel

Micro Electro Mechanical Systems, 2003. MEMS-03 Kyoto. IEEE The Sixteenth Annual International Conference on

ISSN

1084-6999

Print_ISBN

0-7803-7744-3

Type

conf

DOI

10.1109/MEMSYS.2003.1189846

Filename

1189846