Title :
Microplasma diagnostics by emission spectroscopy
Author :
Blajan, M. ; Muramatsu, S. ; Kuwabara, T. ; Umeda, A. ; Shimizu, K.
Author_Institution :
Innovation & Joint Res. Center, Shizuoka Univ., Hamamatsu, Japan
Abstract :
Microplasma technology was used in the last years for various applications such as NOx removal, sterilization of bacteria or surface treatment. The advantages of microplasma consist in reduced size of the reactor and low discharge voltage. Phenomena of microplasma could be analyzed using emission spectroscopy method. Our microplasma is atmospheric pressure nonthermal plasma. It is a dielectric barrier discharge generated between perforated metallic electrodes covered by a dielectric layer at small discharge gaps between 0 -100 μm. Thus the discharge voltage is around 1 kV Nitrogen, oxygen and argon were used as discharge gases. The emission spectra were measured by an ICCD camera, a spectrometer and a photomultiplier tube. Microplasma was pulsed powered by a Marx Generator and a high voltage amplifier.
Keywords :
argon; discharges (electric); plasma diagnostics; plasma temperature; pulse generators; Marx Generator; SPECAIR software; argon; atmospheric pressure nonthermal plasma; dielectric barrier discharge; dielectric layer; discharge gaps; discharge voltage; emission spectra; emission spectroscopy; high voltage amplifier; metallic electrodes; microplasma diagnostics; microplasma temperatures; nitrogen; oxygen; Atmospheric-pressure plasmas; Dielectrics; Inductors; Low voltage; Microorganisms; Plasma measurements; Pulse amplifiers; Spectroscopy; Surface discharges; Surface treatment;
Conference_Titel :
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location :
Norfolk, VA
Print_ISBN :
978-1-4244-5474-7
Electronic_ISBN :
0730-9244
DOI :
10.1109/PLASMA.2010.5534303
