Pulsed stress behavior of platinum thin films

Platinum thin film layer´s long-term stability, repeatability, fast response time, and wide temperature range make it a useful choice in many applications. As a result, platinum resistance temperature devices (RTD) are known as the most reliable standard available for temperature measurements. In this paper we focus on the pulsed stress behavior of the platinum thin film layer, used as a conductive layer for heating and temperature sensing and the stability of the resistive properties. During pulsing, in situ monitoring of temperature generation was possible.