DocumentCode
3335716
Title
Challenges and solutions for EEDF extraction from cylindrical langmuir probes
Author
El Saghir, Ahmed ; Shannon, Steven
Author_Institution
North Carolina State Univ., Raleigh, NC, USA
fYear
2010
fDate
20-24 June 2010
Firstpage
1
Lastpage
1
Abstract
One of the most valuable plasma characteristics that can be obtained from a Langmuir probe is the Electron Energy Distribution Function (EEDF). Due to the integral relationship between the probe VI characteristic and the EEDF, it is also one of the most challenging aspects of Langmuir probe analysis.
Keywords
Langmuir probes; plasma temperature; Langmuir probe analysis; cylindrical Langmuir probes; electron energy distribution function; electron temperature extraction; plasma characteristics; Distribution functions; Electrons; Filtering; Filters; Information geometry; Plasma properties; Plasma temperature; Probes; Smoothing methods; Temperature distribution;
fLanguage
English
Publisher
ieee
Conference_Titel
Plasma Science, 2010 Abstracts IEEE International Conference on
Conference_Location
Norfolk, VA
ISSN
0730-9244
Print_ISBN
978-1-4244-5474-7
Electronic_ISBN
0730-9244
Type
conf
DOI
10.1109/PLASMA.2010.5534404
Filename
5534404
Link To Document