A general description of active resonance spectroscopic diagnostic tools for technical plasmas

Author

Lapke, M. ; Oberrath, J. ; Mussenbrock, T. ; Brinkmann, R.P.

Author_Institution

Center for Plasma Sci. & Technol., Ruhr-Univ. Bochum, Bochum, Germany

fYear

2010

fDate

20-24 June 2010

Firstpage

1

Lastpage

1

Abstract

This contribution investigates resonance spectroscopic plasma diagnostic. The idea is simple - the frequency dependence of the power absorption is displayed via a rf-signal fed to an antenna. Using the absorption spectrum, plasma parameter like the electron density or electron temperature are calculated. Starting five decades ago numerous concepts based on this idea have been developed as a promising concept for plasma diagnostics in an industrial setting - which means that the proposed methods are robust, calibration free, and economical, and can be used for ideal and reactive plasmas alike.

Keywords

antennas in plasma; plasma density; plasma diagnostics; plasma temperature; absorption spectrum; active resonance spectroscopic diagnostic; electron density; electron temperature; plasma diagnostics; power absorption; radiofrequency-signal; reactive plasma; Absorption; Electrons; Frequency dependence; Plasma applications; Plasma density; Plasma diagnostics; Plasma displays; Plasma temperature; Resonance; Spectroscopy;

fLanguage

English

Publisher

ieee

Conference_Titel

Plasma Science, 2010 Abstracts IEEE International Conference on

Conference_Location

Norfolk, VA

ISSN

0730-9244

Print_ISBN

978-1-4244-5474-7

Electronic_ISBN

0730-9244

Type

conf

DOI

10.1109/PLASMA.2010.5534407

Filename

5534407