Survey on Roller-type Nanoimprint Lithography (RNIL) Process

Author

Lan, Shuhuai ; Hyejin Lee ; Ni, Jun ; Lee, Moongu ; Moongu Lee

Author_Institution

Dept. of Mech. Eng., Shanghai Jiao Tong Univ., Shanghai

fYear

2008

fDate

9-11 April 2008

Firstpage

371

Lastpage

376

Abstract

Nanoimprint lithography has been demonstrated as a high-throughput, high-resolution and low-cost manufacturing method on nano scale pattering since it was first proposed by Dr. S.Y. Chou in 1995. In this article we presented a general literature review on the roller-type nanoimprint tithography (RNIT), a continuous nanoimprint lithography process. Several kinds of typical Roller-type Nanoimprint Lithography process have been briefly introduced and some examples are also introduced to gain a clear general view and perceive.

Keywords

costing; nanolithography; rollers (machinery); soft lithography; literature review; low-cost manufacturing method; nano scale pattering; roller-type nanoimprint lithography; Biomedical optical imaging; Lithography; Manufacturing industries; Manufacturing processes; Mechanical engineering; Nanobioscience; Nanolithography; Optical device fabrication; Optoelectronic and photonic sensors; Production; nanoimprint lithography (NIL); roller-type nanoimprint lithography (RNIL);

fLanguage

English

Publisher

ieee

Conference_Titel

Smart Manufacturing Application, 2008. ICSMA 2008. International Conference on

Conference_Location

Gyeonggi-do

Print_ISBN

978-89-950038-8-6

Electronic_ISBN

978-89-962150-0-4

Type

conf

DOI

10.1109/ICSMA.2008.4505555

Filename

4505555