DocumentCode :
3337521
Title :
Thermoelectric characteristics of Si/Ge superlattice thin film at low temperature
Author :
Hamabe, M. ; Takahashi, H. ; Yamaguchi, S. ; Komine, T. ; Eura, T. ; Okamoto, Y. ; Morimoto, J.
Author_Institution :
Dept. of Eng., Chubu Univ., Aichi, Japan
fYear :
2002
fDate :
25-29 Aug. 2002
Firstpage :
122
Lastpage :
125
Abstract :
We have been studied thermoelectric characteristics of Si/(Au-doped Ge) superlattice thin films at temperatures from room temperature (RT) to low temperatures less than 100 K and compared these to those of Si and (Au+Ge) alloy thin film. In the Si/(Ge+Au) superlattice after heating process the electric resistivity decreased at all temperature. This annealed Si/(Ge+Au) superlattice showed the high thermoelectric power of 105 μV/K at 290 K, compared with the unannealed Si/(Ge+Au) or the alloy film. At temperatures less than 200 K, however, the thermoelectric power of the unannealed Si/(Ge+Au) switched polarities from positive to negative and reached -4.6 mV/K at 80 K. This large negative thermoelectric power at low temperature was not observed in the annealed Si/(Ge+Au) or the alloy film. On the other hand, magnetic field characteristics of all samples showed no effect at 100 K, 200 K or 290 K. This was explained using the two-band parabolic model calculation, assuming that a large amount of Au-doping caused a very low carrier mobility.
Keywords :
annealing; carrier mobility; electrical resistivity; elemental semiconductors; germanium; gold; semiconductor superlattices; silicon; thermoelectric power; 80 to 300 K; Si-Ge:Au; Si-GeAu; Si/Ge superlattice thin film; annealing; carrier mobility; electric resistivity; low temperature; thermoelectric characteristics; thermoelectric power; two-band parabolic model calculation; Annealing; Electric resistance; Germanium alloys; Resistance heating; Semiconductor films; Semiconductor thin films; Silicon alloys; Superlattices; Temperature; Thermoelectricity;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Thermoelectrics, 2002. Proceedings ICT '02. Twenty-First International Conference on
Print_ISBN :
0-7803-7683-8
Type :
conf
DOI :
10.1109/ICT.2002.1190280
Filename :
1190280
Link To Document :
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