Micro Electrochemical Machining for Complex Internal Micro Features

Micromachining of internal features by electrochemical machining (ECM) is investigated. By controlling pulse conditions and using a customized tool electrode, micro features were machined on the side wall of a micro hole. In micro ECM, longer pulse on-time enlarges the side gap. A reverse tapered hole and a barrel-shape hole were fabricated through pulse duration control. Micro cavity was machined by controlling the pulse duration and machining time in similar manner. A micro disk-shape electrode was used to machine microgroove inside the hole, which is similar to turning lathe process.