DocumentCode :
3337960
Title :
Integrated Microsystems: Merging MEMS, micropower electronics, and wireless communications
Author :
Wise, K.D.
Author_Institution :
The University of Michigan
fYear :
1999
fDate :
18-18 Sept. 1999
fLanguage :
English
Publisher :
ieee
Conference_Titel :
ASIC/SOC Conference, 1999. Proceedings. Twelfth Annual IEEE International
Conference_Location :
Washington, DC, USA
Print_ISBN :
0-7803-5632-2
Type :
conf
DOI :
10.1109/ASIC.1999.806460
Filename :
806460
Link To Document :
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