Characterization of CMOS position sensitive solid-state photomultipliers

We have designed position sensitive solid-state photomultipliers (PS-SSPM) using a complementary metal-oxide-semiconductor (CMOS) process. Four variations of the PS-SSPM design were fabricated, however, only three were characterized for their energy and coincidence timing resolution, spatial resolution, and scintillator array imaging. Each PS-SSPM is 1.5 × 1.5 mm², however, each device has different micro-pixel geometries and different micro-pixel electrical readout for event position sensing. When coupled to 1 × 1 × 20 mm³ LYSO, the energy resolution at 511 keV was measured as a function of bias. The same LYSO scintillator was used to measure the coincidence timing resolution. Results varied from 2.1 ns to 1.0 ns (FWHM) at 511 keV. Spatial resolution studies were conducted using a focused (~15 ¿m beam spot diameter) pulsed 635 nm diode laser. For each PS-SSPM, the X and Y FWHM spatial resolution was measured between 70 and 75 ¿m (FWHM). Lastly, a scintillator array studies were conducted for each PS-SSPM using a CsI:Tl and LYSO array having 300 × 300 ¿m² and 500 × 500 ¿m² pixels respectively.