Title :
Towards 100 nm resolution X-Ray tomography
Author :
Bruyndonckx, P. ; Sasov, A. ; Pauwels, B. ; Liu, X.
Author_Institution :
SkyScan N.V., Belgium
fDate :
Oct. 24 2009-Nov. 1 2009
Abstract :
Using a nano-focus x-ray source we have been able to visualize structures down to 150 nm in x-ray projection images. Because of their unlimited depth of focus, these sources don´t restrict the specimen size in case of 3D tomographic imaging. Simulation studies have shown that optimization of the detector response curve and switching from a reflective x-ray target to a transmission target might allow us to reach sub-100 nm resolutions.
Keywords :
X-ray detection; X-ray imaging; X-ray optics; tomography; X-ray projection images; depth of focus; detector response curve optimisation; nanofocus X-ray source; nanometer resolution X-ray tomography; transmission X-ray target; Nuclear and plasma sciences; X-ray tomography;
Conference_Titel :
Nuclear Science Symposium Conference Record (NSS/MIC), 2009 IEEE
Conference_Location :
Orlando, FL
Print_ISBN :
978-1-4244-3961-4
Electronic_ISBN :
1095-7863
DOI :
10.1109/NSSMIC.2009.5402349