DocumentCode
3339328
Title
Some experimental results on electrical Ni/Cr contacts on thermoconductive materials
Author
Morosanu, Constantin ; Nedelcu, Marin
Author_Institution
Nat. Inst. for Mater. Phys., Bucharest, Romania
fYear
2002
fDate
25-29 Aug. 2002
Firstpage
569
Lastpage
570
Abstract
Some Cr, Ni films have been deposited by RF (1.78 MHz) magnetron sputtering onto thermoelectric materials substrates at low temperatures (<100°C). We have found good adherence values (>100 kgf/cm2) onto n and p type substrates. Peltier devices prepared from these wafers and tested using the standard procedure (Melcor Corp.) demonstrated good values of various electrical parameters, similar with those obtained using classical contacts. This research proved the possibility of producing good quality Peltier devices using Ni/Cr electrical contacts obtained by a large scale and versatile deposition method.
Keywords
adhesion; chromium; electrical contacts; nickel; ohmic contacts; semiconductor-metal boundaries; sputter deposition; thermoelectric devices; thermoelectricity; 1.78 MHz; 100 degC; Ni-Cr; Ni/Cr electrical contacts; Peltier devices; RF magnetron sputtering; adherence; n-type substrate; p-type substrate; thermoconductive materials; thermoelectric materials substrates; wafers; Chromium; Contacts; Large-scale systems; Magnetic materials; Radio frequency; Sputtering; Temperature; Testing; Thermoelectric devices; Thermoelectricity;
fLanguage
English
Publisher
ieee
Conference_Titel
Thermoelectrics, 2002. Proceedings ICT '02. Twenty-First International Conference on
Print_ISBN
0-7803-7683-8
Type
conf
DOI
10.1109/ICT.2002.1190382
Filename
1190382
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