DocumentCode
3340766
Title
Investigation of barrier layers on ceramics for silicon thin film solar cells
Author
Slaoui, A. ; Rusu, M. ; Fosca, A. ; Torrecillas, R. ; Alvarez, Eduardo ; Gutja, A.
Author_Institution
PHASE-CNRS, Strasbourg, France
fYear
2002
fDate
19-24 May 2002
Firstpage
90
Lastpage
93
Abstract
Crystalline silicon thin films solar cells made by high temperature deposition on foreign substrate have the potential for reducing the cost through material consumption. The draw-back could be the possible migration of impurities from the substrate to the active layer. Here we investigated the diffusion of contaminants from ceramic substrates, namely mullite and SiAlON using the Deep Level Transient Spectroscopy (DLTS) technique as indirect method of impurity detection in silicon. We have identified Mg, Mn and Fe as the main contaminants. We have also shown that coating the ceramics with ONO or SOG layers reduces drastically the impurities concentrations in silicon. These layers are therefore efficient barrier layers.
Keywords
ceramics; deep level transient spectroscopy; diffusion barriers; elemental semiconductors; iron; magnesium; manganese; silicon; solar cells; surface contamination; surface diffusion; DLTS; ONO layers; SOG layers; Si; Si thin film solar cells; Si:Fe; Si:Mg; Si:Mn; SiAlON; barrier layers; ceramics; contaminants diffusion; foreign substrate; high temperature deposition; impurities migration; material consumption; mullite; Ceramics; Costs; Crystallization; Impurities; Photovoltaic cells; Semiconductor thin films; Silicon; Sputtering; Substrates; Temperature;
fLanguage
English
Publisher
ieee
Conference_Titel
Photovoltaic Specialists Conference, 2002. Conference Record of the Twenty-Ninth IEEE
ISSN
1060-8371
Print_ISBN
0-7803-7471-1
Type
conf
DOI
10.1109/PVSC.2002.1190463
Filename
1190463
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