Title :
Identifying dielectric and resistive electrode losses in high-density capacitors at radio frequencies
Author :
Tiggelman, M.P.J. ; Reimann, K. ; Liu, J. ; Klee, M. ; Keur, W. ; Mauczock, R. ; Schmitz, J. ; Hueting, R.J.E.
Author_Institution :
Dept. of Semicond. Components, Univ. of Twente, Enschede
Abstract :
A regression-based technique is presented which distinguishes the dielectric loss from the resistive loss of high density planar capacitors in a very wide bandwidth of 0.1-8 GHz. Moreover, the procedure yields useful results if the capacitor deviates from a lumped element model and indicates when the used approximations break down or whether size-dependent loss mechanisms exist.
Keywords :
capacitors; dielectric losses; regression analysis; bandwidth 0.1 GHz to 8 GHz; dielectric electrode loss; high-density capacitors; lumped element model; planar capacitors; radio frequencies; regression-based technique; resistive electrode loss; Capacitance measurement; Capacitors; Dielectric losses; Electrodes; Ferroelectric materials; Parasitic capacitance; Probes; Radio frequency; Radiofrequency identification; Semiconductor device testing;
Conference_Titel :
Microelectronic Test Structures, 2008. ICMTS 2008. IEEE International Conference on
Conference_Location :
Edinburgh
Print_ISBN :
978-1-4244-1800-8
Electronic_ISBN :
978-1-4244-1801-5
DOI :
10.1109/ICMTS.2008.4509337
