• DocumentCode
    3343189
  • Title

    Advances in continuous, in-line processing of stable CdS/CdTe devices

  • Author

    Barth, Kurt L. ; Enzenroth, R.A. ; Sampath, W.S.

  • Author_Institution
    Mater. Eng. Lab., Colorado State Univ., Fort Collins, CO, USA
  • fYear
    2002
  • fDate
    19-24 May 2002
  • Firstpage
    551
  • Lastpage
    554
  • Abstract
    A continuous, in-line process suitable for large volume manufacturing of CdS/CdTe photovoltaic (PV) devices has been demonstrated at the pilot scale level. The pilot scale system incorporates the steps of glass heating, all semiconductor depositions, chloride heat treatment and ohmic contact formation in one chamber operating at modest vacuum. The cycle time is 2 minutes. The process is scaleable, uniform and reproducible. Utilizing this process, devices with efficiencies greater than 12% (verified at NREL) are repeatedly fabricated on unmodified Pilkington TEC 15 substrates without anti-reflection coatings. The stability of the devices is very promising. Many devices are being tested outdoors for stability. Outdoor results are compared to indoor stress testing. Detailed analyses of the novel copper based ohmic contact using X-ray photoelectron spectroscopy (XPS) and glancing angle X-ray diffraction (GAXRD) are presented.
  • Keywords
    II-VI semiconductors; X-ray diffraction; X-ray photoelectron spectra; cadmium compounds; environmental testing; heat treatment; life testing; ohmic contacts; semiconductor device manufacture; semiconductor device testing; semiconductor growth; solar cells; 12 percent; 2 min; CdS-CdTe; CdS/CdTe photovoltaic devices; X-ray photoelectron spectroscopy; chloride heat treatment; continuous in-line processing; copper based ohmic contact; cycle time; efficiencies; glancing angle X-ray diffraction; glass heating; indoor stress testing; large volume manufacturing; modest vacuum; ohmic contact formation; one chamber; outdoor testing; pilot scale level; scaleable uniform reproducible process; semiconductor depositions; stability; stable CdS/CdTe devices; unmodified Pilkington TEC 15 substrates; Glass; Heat treatment; Manufacturing processes; Ohmic contacts; Photovoltaic systems; Semiconductor device manufacture; Solar power generation; Stability; Testing; Vacuum systems;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Photovoltaic Specialists Conference, 2002. Conference Record of the Twenty-Ninth IEEE
  • ISSN
    1060-8371
  • Print_ISBN
    0-7803-7471-1
  • Type

    conf

  • DOI
    10.1109/PVSC.2002.1190624
  • Filename
    1190624