DocumentCode :
3343741
Title :
GaN nanocolumus on Si(III) grown by molecular beam epitaxy
Author :
Calarco, R. ; Marso, M. ; Meijers, R. ; Richter, T. ; Aykanat, A.I. ; Stoica, T. ; Luth, H.
fYear :
2004
fDate :
17-21 Oct. 2004
Firstpage :
9
Lastpage :
12
Abstract :
GaN nanocolumns are reproducibly grown by plasma-assisted molecular beam epitaxy on Si(111). The nanocolumn density and diameter, 20-150 nm, are controlled by means of the III/V ratio. The nanocolumns grow parallel to the {J 11] direction of the Sf substrate. The columns have been transferred to a Si(100) substrate covered with a layer of 300nm SiD2. Single nanowire devices have been fabricated using finger shaped electrical contacts (TiIAu) obtained by e-beam patterning technique. The electrical transport properties of the resulting metal-semiconductor-metal nanostructures are analyzed by means of currentvoltage measurements in dark and under UV-illumination.
Keywords :
Epitaxial growth; Gallium nitride; III-V semiconductor materials; Molecular beam epitaxial growth; Nanoscale devices; Plasma density; Plasma temperature; Semiconductor nanostructures; Substrates; Surface morphology;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Advanced Semiconductor Devices and Microsystems, 2004. ASDAM 2004. The Fifth International Conference on
Conference_Location :
Smolenice Castle, Slovakia
Print_ISBN :
0-7803-8335-7
Type :
conf
DOI :
10.1109/ASDAM.2004.1441145
Filename :
1441145
Link To Document :
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