DocumentCode
3348044
Title
Optimization of double-side 3D detector technology for first productions at FBK
Author
Vianello, Elisa ; Bagolini, Alvise ; Bellutti, Pierluigi ; Boscardin, Maurizio ; Betta, Gian-Franco Dalla ; Giacomini, Gabriele ; Piemonte, Claudio ; Povoli, Marco ; Zorzi, Nicola
Author_Institution
Centro per i Mater. e i Microsistemi, Fondazione Bruno Kessler, Povo diTrento, Italy
fYear
2011
fDate
23-29 Oct. 2011
Firstpage
523
Lastpage
528
Abstract
We report on the optimization of the technology aimed at the production of Double-Sided, Double-Column 3D detectors with full passing columns (3D-DTTC) at FBK (Trento, Italy). This R&D project is aimed at establishing a suitable technology for the production of 3D pixel sensors to be installed into the ATLAS IBL. We describe the main process modifications adopted on more recent 3D batches, to overcome the limitations affecting the first 3D batch, as arisen from its electrical characterization.
Keywords
electrodes; silicon radiation detectors; 3D pixel sensors; 3D-DTTC; ATLAS IBL; FBK; double column 3D detectors; double side 3D detector technology optimization; double sided 3D detectors; passing columns; Continuous wavelet transforms; Electric breakdown; Three dimensional displays;
fLanguage
English
Publisher
ieee
Conference_Titel
Nuclear Science Symposium and Medical Imaging Conference (NSS/MIC), 2011 IEEE
Conference_Location
Valencia
ISSN
1082-3654
Print_ISBN
978-1-4673-0118-3
Type
conf
DOI
10.1109/NSSMIC.2011.6154102
Filename
6154102
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