A new hybrid macro- and micro-range fast tool servo

Author

Liu, Qiang ; Zhou, Xiaoqin ; Wang, Liding

Author_Institution

Sch. of Mech. Sci. & Eng., Jilin Univ., Changchun, China

fYear

2010

fDate

26-28 June 2010

Firstpage

3124

Lastpage

3127

Abstract

A new hybrid macro-and micro-range fast tool servo (FTS) system is developed that enables diamond turning of optical free-form surfaces. The macro-range FTS is driven by a voice coil motor (VCM), and a PZT actuator is used to drive the micro-range FTS, both of which are guided by flexure hinge. The output force of the VCM is enlarged by a lever. A high resolution laser sensor is utilized to measure the displacement of the FTS. The static mechanical performance of flexure hinge has been analyzed. Experimental tests have been carried out to verify the performance of the FTS. The resolution of the macro-range FTS is 34nm with bandwidth up to 16Hz, and the resolution of the micro-displacement FTS can reach to 15nm and the bandwidth reaches 200Hz.

Keywords

fasteners; piezoelectric actuators; servomechanisms; turning (machining); PZT actuator; bandwidth 200 Hz; diamond turning; flexure hinge; high resolution laser sensor; macro-range FTS; macro-range fast tool servo; micro-range fast tool servo; optical free-form surface; static mechanical performance; voice coil motor; Actuators; Bandwidth; Coils; Fasteners; Force sensors; Micromotors; Optical sensors; Servomechanisms; Servomotors; Turning; PZT actuator; fast tool servo(FTS); flexure hinge; laser sensor; voice coil motor(VCM);

fLanguage

English

Publisher

ieee

Conference_Titel

Mechanic Automation and Control Engineering (MACE), 2010 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-7737-1

Type

conf

DOI

10.1109/MACE.2010.5535544

Filename

5535544