Application of hydrothermal mechanism for tailor-making perovskite titanate films

Author

Xu, W. Ping ; Zheng, Lirong ; Xin, Huoping ; Okuyama, Masanori ; Lin, Chenglu

Author_Institution

Inst. of Metall., Acad. Sinica, Shanghai, China

fYear

1996

fDate

25-30 Sep 1996

Firstpage

617

Lastpage

622

Abstract

In this paper, the hydrothermal preparation mechanism for BaTiO ₃ films formed on Ti-covered silicon substrates was successfully applied to the preparation of other titanate films. As the result, (110)-oriented BaTiO₃ films and epitaxial PbTiO₃ films were hydrothermally grown on TiO₂/Si and SrTiO ₃ substrates, respectively. Finally, a method combining the hydrothermal process with sol-gel method was positively recommended and realized in the synthesis of perovskite PZT(52/48) films

Keywords

barium compounds; ceramics; ferroelectric materials; ferroelectric thin films; lead compounds; liquid phase epitaxial growth; sol-gel processing; (110)-oriented BaTiO₃ films; BaTiO₃; BaTiO₃ films; PZT; PbTiO₃; PbZrO3TiO3; Si; SrTiO₃; SrTiO₃ substrates; Ti; Ti-covered silicon substrates; TiO₂; TiO₂/Si substrates; epitaxial PbTiO₃ films; hydrothermal mechanism; mild hydrothermal route; perovskite ABO₃ films; perovskite PZT(52/48) films; perovskite titanate films; sol-gel method; solid-state synthesis; Chemistry; Ferroelectric films; Ferroelectric materials; Semiconductor films; Semiconductor thin films; Silicon; Solid state circuits; Substrates; Temperature; Titanium compounds;

fLanguage

English

Publisher

ieee

Conference_Titel

Electrets, 1996. (ISE 9), 9th International Symposium on

Conference_Location

Shanghai

Print_ISBN

0-7803-2695-4

Type

conf

DOI

10.1109/ISE.1996.578177

Filename

578177