Single contact optical beam induced currents (SCOBIC)-technique and applications

Author

Chin, J.M. ; Palaniappan, M. ; Phang, J.C.H. ; Chan, D.S.H. ; Soh, C.E. ; Gilfeather, G.

Author_Institution

Adv. Micro Devices (Singapore) Pte. Ltd., Singapore

fYear

2001

fDate

2001

Firstpage

42

Lastpage

49

Abstract

The single contact optical beam induced currents (SCOBIC) method is a new failure analysis technique. By connecting the substrate or power pins of an integrated circuit to the current amplifier, many junctions can be imaged. This is in contrast to the optical beam induced current (OBIC) technique, where only the junction directly connected to the current amplifier is imaged. The implementation of the SCOBIC approach is discussed and experimental results which validate the SCOBIC technique are presented. Application of the SCOBIC technique for CMOS front side and back side devices is also discussed

Keywords

CMOS integrated circuits; OBIC; amplifiers; failure analysis; integrated circuit reliability; integrated circuit testing; CMOS back side devices; CMOS front side devices; IC power pins; IC substrate; OBIC technique; SCOBIC; SCOBIC applications; SCOBIC method; SCOBIC technique; current amplifier; directly connected junction; integrated circuit; junction imaging; optical beam induced current technique; single contact optical beam induced currents; Failure analysis; Laser beams; Optical amplifiers; Optical beams; Optical imaging; Optical modulation; Optical pulse generation; Pulse amplifiers; Pulse modulation; Signal analysis;

fLanguage

English

Publisher

ieee

Conference_Titel

Physical and Failure Analysis of Integrated Circuits, 2001. IPFA 2001. Proceedings of the 2001 8th International Symposium on the

Print_ISBN

0-7803-6675-1

Type

conf

DOI

10.1109/IPFA.2001.941452

Filename

941452