Title :
Computation of Parameters Pyroelectric Thin Films in the Embedded Systems
Author :
Golovatsky, R.I.
Abstract :
In this paper the technique of computation frequency dependences of threshold flows and sensitivity of pyroelectric sensor in the built - in systems is offered. The basic characteristics of pyroelectric thin film, on an example of a crystal TGS, suitable to manufacture of detectors of movement on uniform of CIMS technology also are designed, in view of her features.
Keywords :
pyroelectric detectors; pyroelectricity; thin film sensors; embedded systems; pyroelectric sensor; pyroelectric thin films; sensitivity; threshold flows; CMOS technology; Computer integrated manufacturing; Embedded computing; Embedded system; Frequency; Integrated circuit technology; Low-frequency noise; Pyroelectricity; Sensor phenomena and characterization; Transistors; CIMS Technology; Embedded systems; MEMS; TGS; pyroelectric sensor; pyroelectric thin films;
Conference_Titel :
CAD Systems in Microelectronics, 2007. CADSM '07. 9th International Conference - The Experience of Designing and Applications of
Conference_Location :
Lviv-Polyana
Print_ISBN :
966-533-587-0
DOI :
10.1109/CADSM.2007.4297652
