Title :
Short failure analysis under fault isolation
Author :
Mai, Z.H. ; Palaniappan, M. ; Chin, J.M. ; Soh, C.E. ; Knauss, L.A. ; Fleet, E.F.
Author_Institution :
Device Analysis Lab., Adv. Micro Devices (Singapore) Pte. Ltd., Singapore
Abstract :
Scanning superconducting quantum interference device (SQUID) microscopy, along with real time X-ray (RTX) microscopy and scanning acoustic microscopy (SAM), was used as a fault isolation tool for IC short circuit failure analysis. Fault isolation was carried out before physical analysis. Experimental procedures and results for both fault isolation and physical analysis are given in detail
Keywords :
SQUIDs; X-ray microscopy; acoustic microscopy; failure analysis; fault location; integrated circuit reliability; integrated circuit testing; IC short circuit failure analysis; RTX microscopy; fault isolation; fault isolation tool; physical analysis; real time X-ray microscopy; scanning SQUID microscopy; scanning acoustic microscopy; scanning superconducting quantum interference device microscopy; short failure analysis; Circuit faults; Educational institutions; Failure analysis; Integrated circuit packaging; Interference; Magnetic analysis; Magnetic sensors; Microscopy; SQUIDs; Superconducting devices;
Conference_Titel :
Physical and Failure Analysis of Integrated Circuits, 2001. IPFA 2001. Proceedings of the 2001 8th International Symposium on the
Print_ISBN :
0-7803-6675-1
DOI :
10.1109/IPFA.2001.941486