Title :
Investigation of the humidity sensitivity in Fe3O4 thin films using porous ZrO2 ceramics as carriers
Author :
Li, XinShan ; Zhang, Jiancheng ; Meng, Zhongyan
Author_Institution :
Sch. of Mater. Sci. & Technol., Shanghai Univ., China
Abstract :
Porous ZrO2 ceramics have been prepared by sol-gel process. The porous ZrO2 ceramics were used as carriers, and the thin films of the typical humidity material Fe3O4 system were deposited on the inner surfaces of the pores via sol-gel technique. The thin films were treated at 250°C for 1 hr. It is found that the resistivity of the sample is decreased by four orders of magnitude when the humidity changes from 0%RH to 100%RH and has a rapid response time, which is about 1 s. The micrographs of the samples were observed by SEM
Keywords :
ceramics; electric sensing devices; electrical resistivity; heat treatment; humidity sensors; iron compounds; porous materials; scanning electron microscopy; sintering; sol-gel processing; zirconium compounds; 1 h; 250 C; Fe3O4 thin films; SEM; ZrO2-Fe3O4; humidity sensitivity; inner surfaces; micrographs; porous ZrO2 ceramics; rapid response time; resistivity; sol-gel process; thin films; Atmosphere; Ceramics; Humidity; Polymers; Rough surfaces; Scanning electron microscopy; Surface roughness; Temperature dependence; Temperature distribution; Transistors;
Conference_Titel :
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-2695-4
DOI :
10.1109/ISE.1996.578184
