Microwave integrated circuits using thin-film BST

Author

York, R. ; Nagra, A. ; Erker, E. ; Taylor, T. ; Periaswamy, P. ; Speck, J. ; Streiffer, S. ; Auciello, O.

Author_Institution

Dept. of Electr. & Comput. Eng., California Univ., Santa Barbara, CA, USA

Volume

1

fYear

2000

fDate

2000

Firstpage

195

Abstract

We discuss the development and potential applications of a microwave varactor technology using thin-film BST on inexpensive substrates. BST thin-films have been developed and optimized specifically for microwave integrated circuits, using both MOCVD-grown and RF magnetron-sputtered films. The material optimization efforts have concentrated on achieving high tunability and simultaneous low loss, and also developing robust electrode systems for circuit fabrication on silicon substrates. We present advances in monolithic microwave integrated capacitors and application to high performance and low-cost phase-shifters circuits. Efforts in frequency multiplication devices will also be presented

Keywords

MMIC frequency convertors; MMIC phase shifters; barium compounds; ferroelectric capacitors; strontium compounds; thin film capacitors; varactors; BaSrTiO₃; MOCVD-grown films; RF magnetron-sputtered films; frequency multiplication devices; high tunability; material optimization; microwave integrated circuits; microwave varactor technology; monolithic microwave integrated capacitors; phase-shifter circuits; robust electrode; simultaneous low loss; thin-film BST; Binary search trees; Integrated circuit technology; Magnetic materials; Microwave integrated circuits; Microwave technology; Radio frequency; Radiofrequency integrated circuits; Substrates; Thin film circuits; Varactors;

fLanguage

English

Publisher

ieee

Conference_Titel

Applications of Ferroelectrics, 2000. ISAF 2000. Proceedings of the 2000 12th IEEE International Symposium on

Conference_Location

Honolulu, HI

ISSN

1099-4734

Print_ISBN

0-7803-5940-2

Type

conf

DOI

10.1109/ISAF.2000.941540

Filename

941540