Title :
Biomedical applications of MEMS
Author_Institution :
Cepheid, San Jose, CA, USA
Abstract :
Exploiting the materials and processing techniques developed for integrated circuits, silicon micromachining technology has been responsible for fundamental improvements in many, diverse fields of biomedicine. This paper reviews current state-of-the-art biomedical applications of micromachining technology such as pressure sensors and biochemical sensors. In addition, we discuss significant new biomedical innovations on the horizon which make use of micromachining techniques and processes.
Keywords :
biomedical electronics; biomedical equipment; biosensors; blood pressure measurement; chemical sensors; micromachining; microsensors; pressure sensors; MEMS; Si; biochemical sensors; biomedical applications; biomedicine; integrated circuits; microelectromechanical systems; pressure sensors; silicon micromachining technology; Biomedical monitoring; Biosensors; Blood; Calibration; Chemicals; Chemistry; Instruments; Micromachining; Micromechanical devices; Silicon;
Conference_Titel :
Electron Devices Meeting, 1996. IEDM '96., International
Conference_Location :
San Francisco, CA, USA
Print_ISBN :
0-7803-3393-4
DOI :
10.1109/IEDM.1996.553575
