Title :
A multi-grid method to solve the squeeze film damping of micro-resonator
Author :
Shanmin, Huang ; Pu, Li ; Yuming, Fang
Author_Institution :
Sch. of Mech. Eng., Southeast Univ., Nanjing, China
Abstract :
Predicting squeeze film damping is crucial in the design of MEMS devices. In view of the problems existing in the process of solving squeeze film damping, a multi-grid method is used to solve the squeeze film damping of micro-resonator, and a satisfying result is obtained. The multi-grid algorithm is considered having the advantage of rapid convergence and good numerical stability when solving the liquid questions of squeeze film damping. The pressure distribution functions between resonator plates and the value of various performance indicators are obtained. The relationships between the frequency and the amplitude also the frequency and the phase as well as the characteristics of damping force are obtained.
Keywords :
damping; iterative methods; microcavities; micromechanical resonators; vibrations; MEMS devices design; microresonator; multigrid method; numerical stability; pressure distribution functions; squeeze film damping; Boundary conditions; Damping; Differential algebraic equations; Finite difference methods; Frequency; Geometry; Mechanical engineering; Nonlinear equations; Partial differential equations; Voltage; Micro-resonator; difference multi-grid method; squeeze film damping;
Conference_Titel :
Mechanic Automation and Control Engineering (MACE), 2010 International Conference on
Conference_Location :
Wuhan
Print_ISBN :
978-1-4244-7737-1
DOI :
10.1109/MACE.2010.5535764
