Title :
Study on preparation of Pb(Zr,Ti)O3 thin-films on TiNi SMA substrates using sol-gel techniques
Author :
Li, Xianshan ; Cheng, Jinrong ; Liu, Qingfeng ; Zhang, Jicheng ; Meng, Zhongyan
Author_Institution :
Sch. of Mater. Sci. & Technol., Shanghai Univ., China
Abstract :
The authors investigate piezoelectric Pb(Zr,Ti)O3 thin films on shape memory alloy TiNi substrates prepared by a sol-gel process. Lead acetate, zirconium isopropoxide and titanium n-butyloxide dissolved respectively in a solvent were mixed under nitrogen to form a precursor solution. The resultant solution was spun onto the TiNi SMA substrates at 2000 rpm for 30s. The amorphous thin films were crystallized by annealing in air. It was found that the crack-free PZT thin films displayed good mechanical bonding with the TiNi substrates
Keywords :
annealing; ferroelectric thin films; intelligent materials; lead compounds; piezoceramics; piezoelectric thin films; shape memory effects; sol-gel processing; 30 s; PZT; PbZrO3TiO3; TiNi; amorphous thin films; annealing; crack-free PZT thin films; crystallization; ferroelectric films; good mechanical bonding; intelligent materials; lead acetate; piezoelectric Pb(Zr,Ti)O3 thin films; precursor solution; shape memory alloy TiNi substrates; sol-gel process; spin coating; titanium n-butyloxide; zirconium isopropoxide; Amorphous materials; Crystallization; Lead; Nitrogen; Piezoelectric films; Shape memory alloys; Solvents; Titanium; Transistors; Zirconium;
Conference_Titel :
Electrets, 1996. (ISE 9), 9th International Symposium on
Conference_Location :
Shanghai
Print_ISBN :
0-7803-2695-4
DOI :
10.1109/ISE.1996.578193
