Mechanism of laser interaction with the material and its application

Author

Li, Tianze ; Wen, Fang ; Hou, Luan ; Jiang, Chuan ; Zhang, Xia

Author_Institution

Sch. of Electr. & Electron. Eng., Shandong Univ. of Technol., Zibo, China

fYear

2010

fDate

26-28 June 2010

Firstpage

3864

Lastpage

3867

Abstract

Three kinds of theories about the interaction of laser and material are expounded. The transmission process of laser energy and the Effects of several factors including wavelength, temperature and surface coating on absorption rate are analyzed. The mathematical model and the solution method of the interaction process of laser and material are established, and the applications of laser in the semiconductor material processing with examples. Finally, several important conclusions are produced.

Keywords

laser beam machining; mathematical analysis; semiconductor materials; absorption rate; laser interaction mechanism; laser-material interaction; semiconductor material processing; surface coating factor; temperature factor; wavelength factor; Absorption; Coatings; Laser modes; Laser theory; Optical materials; Semiconductor lasers; Semiconductor materials; Surface emitting lasers; Surface waves; Temperature; absorption rate; interaction of laser and material; material processing; mathematical model;

fLanguage

English

Publisher

ieee

Conference_Titel

Mechanic Automation and Control Engineering (MACE), 2010 International Conference on

Conference_Location

Wuhan

Print_ISBN

978-1-4244-7737-1

Type

conf

DOI

10.1109/MACE.2010.5535811

Filename

5535811