Title :
ULSI inspection system using digital scanning confocal microscopy with applications to PZT film
Author :
Ichikawa, Yoshiharu ; Toriwaki, Jun-ichiro
Author_Institution :
Manuf. Technol. Centre, Texas Instrum. Japan Ltd., Ibaraki, Japan
Abstract :
The Scanning Confocal Microscope has been proposed as an observation method of the 3D objects with a high aspect ratio in the field of biology, physics and electronics etc. By processing a confocal microscopy 2D image which is a kind of tomogram by the optical sectioning, we have developed a new inspection method of the 3D structure of the semiconductor device. In this paper, we describe a reconstruction of the surface microstructure and its application to PZT film with Digital Scanning Confocal Microscopy
Keywords :
DRAM chips; ULSI; capacitors; inspection; integrated circuit testing; lead compounds; optical microscopy; optical tomography; piezoceramics; 3D objects; PZT; PZT film capacitor; PbZrO3TiO3; ULSI; aspect ratio; digital scanning confocal microscopy; inspection system; optical sectioning; surface microstructure; tomogram; Biomedical optical imaging; Image reconstruction; Inspection; Optical devices; Optical films; Optical microscopy; Physics; Scanning electron microscopy; Semiconductor devices; Ultra large scale integration;
Conference_Titel :
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2928-7
DOI :
10.1109/ISSM.1995.524371
