Title :
Next generation processes and equipment that lead to positive environment, safety and health impacts
Author :
Pei, Phyllis ; Kerby, H. Ray
Author_Institution :
SEMATECH, Austin, TX, USA
Abstract :
The technology development needed to support continuous improvement in ESH characteristics of semiconductor manufacturing facilities is changing as strategies for source reduction, incident prevention and more refined schemes for assessing ESH improvement emerge. This paper briefly characterizes the changes taking place in ESH management structure and focuses on examples of technology development underway to satisfy the new model of ESH execution reflected in this structure change
Keywords :
environmental factors; health hazards; management; safety; semiconductor device manufacture; ESH management; environment; health; safety; semiconductor manufacturing facilities; technology development; Biomedical engineering; Chemical technology; Environmental management; Health and safety; Human resource management; Manufacturing industries; Manufacturing processes; Road safety; Safety devices; Technology management;
Conference_Titel :
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2928-7
DOI :
10.1109/ISSM.1995.524388
