Title :
Model-based control of rapid thermal processes
Author :
Breedijk, Terence ; Edgar, Thomas F. ; Trachtenberg, Isaac
Author_Institution :
Dept. of Chem. Eng., Texas Univ., Austin, TX, USA
fDate :
29 June-1 July 1994
Abstract :
Parameter estimation of a nonlinear dynamic model for a rapid thermal processing system in single wafer semiconductor processing has been performed. A model transformation is presented that significantly improves the conditioning of the control system. A successively linearized quadratic dynamic matrix control (QDMC) strategy using the model transformation has been developed. Experimental results of the control strategy are presented and compared with internal model control (IMC) with gain scheduling. The nonlinear controller presented in this paper shows superior performance for the test case studied.
Keywords :
distributed parameter systems; linear quadratic control; nonlinear control systems; optimisation; parameter estimation; process control; rapid thermal processing; semiconductor process modelling; gain scheduling; internal model control; model transformation; model-based control; nonlinear controller; nonlinear dynamic model; parameter estimation; rapid thermal processes; single wafer semiconductor processing; successively linearized quadratic dynamic matrix control strategy; Boundary conditions; CMOS technology; Nonlinear control systems; Nonlinear dynamical systems; Nonlinear equations; Predictive models; Rapid thermal processing; Semiconductor device modeling; Semiconductor process modeling; Temperature;
Conference_Titel :
American Control Conference, 1994
Print_ISBN :
0-7803-1783-1
DOI :
10.1109/ACC.1994.751871
