Title :
A high level treatment of fluorine wastewater to reduce sludge
Author :
Toyoda, Arata ; Taira, Tsutomu
Author_Institution :
Ecology-Based Syst. Res. Labs., NEC Corp., Kawasaki, Japan
Abstract :
A novel technique for treating fluorine wastewater has been developed in order to reduce sludge. This technique utilizes the dependence of solubility and adsorption characteristics of Al(OH)3 gel on pH, and uses Al(OH)3 gel itself repeatedly as a fluorine adsorbent. The reclamation process of Al(OH)3 gel involves varying the pH level of its slurry to allow Al(OH)3 gel to desorb fluorine and be dissolved as an aluminate ion. This technique can treat fluorine wastewater to several ppm at low-cost, and reduce the resulting volume of sludge to a level one-thirtieth the amount produced by the conventional treatment method
Keywords :
adsorption; electronics industry; environmental factors; pH; solubility; water treatment; Al(OH)3; adsorption characteristics; fluorine adsorbent; fluorine wastewater; gel; pH level; reclamation process; sludge reduction; solubility; treatment method; wastewater treatment; Aluminum; Artificial intelligence; Semiconductor device manufacture; Sludge treatment; Slurries; Wastewater treatment; Water;
Conference_Titel :
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2928-7
DOI :
10.1109/ISSM.1995.524391