Trace moisture measurement in HCl gas by near-infrared diode LASER spectroscopy

Author

Ishihara, Yoshio ; Masusaki, Hiroshi ; Wu, Shang-Qian ; Matsumoto, Koh ; Kimijim, Tetsuya

Author_Institution

Nippon Sanso Corp., Tsukuba, Japan

fYear

1995

fDate

17-19 Sep 1995

Firstpage

218

Lastpage

221

Abstract

We have developed a laser absorption spectroscopy with a near-infrared distributed-feedback (DFB) laser diode as an in-situ and real time monitoring system in relation to future ultra-large scale integration (ULSI) technology. There we have found the existence of the H₂O-HCl cluster formed by hydrogen association in HCl gas. We have also demonstrated that the moisture in HCl gas can be precisely estimated by measurement of a vibrational spectrum of the isolated H₂O molecule itself while dissociating the cluster by probing laser energy

Keywords

hydrogen compounds; infrared spectroscopy; measurement by laser beam; moisture measurement; spectrochemical analysis; H₂O; H₂O molecule; H₂O-HCl cluster; HCl; HCl gas; ULSI technology; association; dissociation; in-situ real time monitoring; laser absorption spectroscopy; near-infrared DFB laser diode; trace moisture measurement; vibrational spectrum; Absorption; Diode lasers; Gas lasers; Isolation technology; Moisture measurement; Monitoring; Real time systems; Spectroscopy; Ultra large scale integration; Vibration measurement;

fLanguage

English

Publisher

ieee

Conference_Titel

Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on

Conference_Location

Austin, TX

Print_ISBN

0-7803-2928-7

Type

conf

DOI

10.1109/ISSM.1995.524395

Filename

524395