Title :
Trace moisture measurement in HCl gas by near-infrared diode LASER spectroscopy
Author :
Ishihara, Yoshio ; Masusaki, Hiroshi ; Wu, Shang-Qian ; Matsumoto, Koh ; Kimijim, Tetsuya
Author_Institution :
Nippon Sanso Corp., Tsukuba, Japan
Abstract :
We have developed a laser absorption spectroscopy with a near-infrared distributed-feedback (DFB) laser diode as an in-situ and real time monitoring system in relation to future ultra-large scale integration (ULSI) technology. There we have found the existence of the H2O-HCl cluster formed by hydrogen association in HCl gas. We have also demonstrated that the moisture in HCl gas can be precisely estimated by measurement of a vibrational spectrum of the isolated H2O molecule itself while dissociating the cluster by probing laser energy
Keywords :
hydrogen compounds; infrared spectroscopy; measurement by laser beam; moisture measurement; spectrochemical analysis; H2O; H2O molecule; H2O-HCl cluster; HCl; HCl gas; ULSI technology; association; dissociation; in-situ real time monitoring; laser absorption spectroscopy; near-infrared DFB laser diode; trace moisture measurement; vibrational spectrum; Absorption; Diode lasers; Gas lasers; Isolation technology; Moisture measurement; Monitoring; Real time systems; Spectroscopy; Ultra large scale integration; Vibration measurement;
Conference_Titel :
Semiconductor Manufacturing, 1995., IEEE/UCS/SEMI International Symposium on
Conference_Location :
Austin, TX
Print_ISBN :
0-7803-2928-7
DOI :
10.1109/ISSM.1995.524395
