DocumentCode :
3353081
Title :
Direct writing of conductive aluminum line on aluminum nitride ceramics with TEA CO2 laser
Author :
Yabe, H. ; Takahashi, Asami ; Obara, M.
Author_Institution :
Department of Electrical Engineering, Faculty of Science and Technology, Keio University
Volume :
11
fYear :
1997
fDate :
18-23 May 1997
Firstpage :
99
Lastpage :
99
Keywords :
Aluminum nitride; Artificial intelligence; Ceramics; Electric resistance; Laser beams; Laser modes; Laser theory; Optical pulses; Thermal conductivity; Writing;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
Type :
conf
DOI :
10.1109/CLEO.1997.602299
Filename :
602299
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3353081
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