DocumentCode
3353226
Title
Application of phase-grating beamsplitter to laser-processing indiumtin-oxide film for liquid crystal panel
Author
Amako, J. ; Murai, Masakatsu ; Sonehara, Takeo
Author_Institution
Corporate R & D, Seiko Epson Corporation
Volume
11
fYear
1997
fDate
18-23 May 1997
Firstpage
99
Lastpage
100
Keywords
Artificial intelligence; Electric resistance; Electrical resistance measurement; Electrodes; Gratings; Laser beams; Liquid crystal displays; Optical pulses; Phased arrays; Thickness measurement;
fLanguage
English
Publisher
ieee
Conference_Titel
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location
Baltimore, MD, USA
Print_ISBN
0-7803-4125-2
Type
conf
DOI
10.1109/CLEO.1997.602300
Filename
602300
Link To Document