DocumentCode :
3353356
Title :
Deep UV laser-assisted cryo-etching of GaN
Author :
Chih, M.C. ; Chen, B.C. ; Tsai, C.H. ; Huang, D.W. ; Li, J.H. ; Chiang, H.J. ; Chuang, T.J. ; Yang, C.C. ; Huang, C.N. ; Chen, C.Y. ; Hong, J.M.
Author_Institution :
Institute of Electro-Optical Engineering, National Taiwan University
Volume :
11
fYear :
1997
fDate :
18-23 May 1997
Firstpage :
100
Lastpage :
100
Keywords :
Anisotropic magnetoresistance; Gallium nitride; Gas lasers; Gases; Gratings; Heat sinks; Laser beams; Optical films; Optimized production technology; Wet etching;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics, 1997. CLEO '97., Summaries of Papers Presented at the Conference on
Conference_Location :
Baltimore, MD, USA
Print_ISBN :
0-7803-4125-2
Type :
conf
DOI :
10.1109/CLEO.1997.602301
Filename :
602301
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3353356
