• DocumentCode
    3354684
  • Title

    Closed-loop Optical Control Of AixGa1-xAs Composition During Crystal Growth By OMMBE

  • Author

    Aspnes, D.E. ; Quinn, W.E. ; Gregory, S.

  • Author_Institution
    Bellcore
  • fYear
    1990
  • fDate
    4-9 Nov 1990
  • Firstpage
    576
  • Lastpage
    576
  • Keywords
    Artificial intelligence; Control systems; Dielectric measurements; Ellipsometry; Optical control; Optical films; Semiconductor materials; Signal generators; Thick films; Thickness control;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
  • Print_ISBN
    0-87942-550-4
  • Type

    conf

  • DOI
    10.1109/LEOS.1990.690682
  • Filename
    690682
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=3354684