DocumentCode :
3354684
Title :
Closed-loop Optical Control Of AixGa1-xAs Composition During Crystal Growth By OMMBE
Author :
Aspnes, D.E. ; Quinn, W.E. ; Gregory, S.
Author_Institution :
Bellcore
fYear :
1990
fDate :
4-9 Nov 1990
Firstpage :
576
Lastpage :
576
Keywords :
Artificial intelligence; Control systems; Dielectric measurements; Ellipsometry; Optical control; Optical films; Semiconductor materials; Signal generators; Thick films; Thickness control;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
Type :
conf
DOI :
10.1109/LEOS.1990.690682
Filename :
690682
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3354684
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