DocumentCode :
3354866
Title :
Diode Laser Spectroscopy For Plasma Processing Diagnostics
Author :
Sun, H.C. ; Whittaker, E.A.
Author_Institution :
Stevens Institute of Technology
fYear :
1990
fDate :
4-9 Nov 1990
Firstpage :
577
Lastpage :
578
Keywords :
Absorption; Diode lasers; Frequency modulation; Optical sensors; Plasma applications; Plasma diagnostics; Plasma materials processing; Spectroscopy; Sulfur hexafluoride; Sun;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
Type :
conf
DOI :
10.1109/LEOS.1990.690683
Filename :
690683
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3354866
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