Title :
An Electrostatically Operated Torsion Mirror For Optical Switching Device
Author :
Toshiyoshi, Hiroshi ; Fujita, Hiroyuki
Author_Institution :
The University of Tokyo
Keywords :
Electrostatics; Lenses; Mirrors; Optical attenuators; Optical beams; Optical devices; Optical fibers; Optical sensors; Optical switches; Silicon;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717177
