Title :
Deformable Micromirror Devices As Phase Modulating High Resolution Light Valves
Author :
Kuck, H. ; Doleschal, W. ; Gehner, A. ; Geundke, W. ; Melcher, R. ; Paufler, J. ; Seltmann, R. ; Zimmer, G.
Author_Institution :
Fraunhofer Institute of Microelectronic Circuits and Systems
Keywords :
Aluminum; Elasticity; Electrodes; Gratings; Micromirrors; Mirrors; Phase modulation; Valves; Viscosity; Voltage;
Conference_Titel :
Solid-State Sensors and Actuators, 1995 and Eurosensors IX.. Transducers '95. The 8th International Conference on
Print_ISBN :
91-630-3473-5
DOI :
10.1109/SENSOR.1995.717178
