Title :
Evidence for the Antisite Defect BAs in Si and B Co-Implanted and B Implanted Undoped Si Lec-Gaas Crystal
Author :
Wang, Z.G. ; Wang, C.H. ; Liu, Y.L. ; Luo, Y. ; Wan, S.K. ; Li, G.H. ; Lin, L.Y.
Author_Institution :
Laboratory of Semiconductor Materials Science, Institute of Semiconductors, Chinese Academy of Sciences
Keywords :
Annealing; Boron; Gallium arsenide; Impurities; Laboratories; Photoluminescence; Pollution measurement; Semiconductor materials; Temperature measurement; Vibration measurement;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752676