Title :
Incorporation/extraction of carbon and boron during semi-insulating LEC GaAs growth: roles of hydrogen and carbon monoxide in the puller atmosphere
Author :
Nishio, J. ; Fujita, H.
Author_Institution :
Toshiba Corporation, Japan
Keywords :
Atmosphere; Boron; Contamination; Crystals; Furnaces; Gallium arsenide; Hydrogen; Impurities; Research and development; Temperature;
Conference_Titel :
Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
Print_ISBN :
0-7503-0242-9
DOI :
10.1109/SIM.1992.752682
