• DocumentCode
    335533
  • Title

    Incorporation/extraction of carbon and boron during semi-insulating LEC GaAs growth: roles of hydrogen and carbon monoxide in the puller atmosphere

  • Author

    Nishio, J. ; Fujita, H.

  • Author_Institution
    Toshiba Corporation, Japan
  • fYear
    1992
  • fDate
    21-24 Apr 1992
  • Firstpage
    91
  • Lastpage
    96
  • Keywords
    Atmosphere; Boron; Contamination; Crystals; Furnaces; Gallium arsenide; Hydrogen; Impurities; Research and development; Temperature;
  • fLanguage
    English
  • Publisher
    ieee
  • Conference_Titel
    Semi-Insulating III-V Materials, 1992 Proceedings of the 7th Conference on
  • Print_ISBN
    0-7503-0242-9
  • Type

    conf

  • DOI
    10.1109/SIM.1992.752682
  • Filename
    752682
    • Link To Document
    https://search.isc.ac/dl/search/defaultta.aspx?DTC=49&DC=335533