Title :
F/sub 2/ lasers: precise shaping and trimming of photonic components
Author :
Herman, Peter R. ; Chen, K. ; Li, Jie ; Wei, Mu-Hsin ; Ihlemann, J. ; Marowsky, G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Toronto Univ., Ont., Canada
fDate :
July 30 2001-Aug. 1 2001
Abstract :
The F/sub 2/-laser nanofabrication facility at the University of Toronto is aimed at demonstrating the utility of applying progressively shorter wavelength lasers in micro-structuring transparent optical materials (glasses, ceramics, semiconductor materials) and in laser printing of miniature optical devices directly inside optical fibers and optical circuits.
Keywords :
excimer lasers; fluorine; laser beam machining; measurement errors; micro-optics; nanotechnology; optical elements; optical materials; printing; F/sub 2/; F/sub 2/ lasers; F/sub 2/-laser nanofabrication facility; ceramics; glasses; laser beam machining; laser beam trimming; laser printing; micro-structuring; miniature optical devices; optical circuits; optical fibers; photonic components; precise shaping; semiconductor materials; transparent optical materials; Ceramics; Fiber lasers; Glass; Nanofabrication; Optical devices; Optical fibers; Optical materials; Printing; Semiconductor lasers; Semiconductor materials;
Conference_Titel :
Advanced Semiconductor Lasers and Applications/Ultraviolet and Blue Lasers and Their Applications/Ultralong Haul DWDM Transmission and Networking/WDM Components, 2001. Digest of the LEOS Summer Topica
Conference_Location :
Copper Mountain, CO, USA
Print_ISBN :
0-7803-7100-3
DOI :
10.1109/LEOSST.2001.941919
