Title :
Microdischarge arrays: a new family of UV sources
Author :
Park, S.-J. ; Eden, J.G.
Author_Institution :
Dept. of Electr. & Comput. Eng., Illinois Univ., Urbana, IL, USA
fDate :
July 30 2001-Aug. 1 2001
Abstract :
We report recent progress in the fabrication of micro hollow cathode discharge arrays that can be utilized as a miniature UV generation source having the size of tens - hundreds of microns. Microdischarges exhibit several novel characteristics, for example, high power loading (tens - hundreds of kW/cc) and high operational pressure. And especially, we can easily obtain any wavelength ranges of radiation from the device just by changing discharge gases. Furthermore, since various types of device structures and device materials have been developed, a number of lighting applications are available.
Keywords :
arrays; glow discharges; light sources; micromechanical devices; device materials; device structures; discharge gases; high operational pressure; high power loading; lighting applications; micro hollow cathode discharge array fabrication; microdischarge array UV sources; miniature UV generation source; Anodes; Atmosphere; Cathodes; Dielectric devices; Fault location; Laboratories; Optical arrays; Plasma stability; Polymer films; Ultraviolet sources;
Conference_Titel :
Advanced Semiconductor Lasers and Applications/Ultraviolet and Blue Lasers and Their Applications/Ultralong Haul DWDM Transmission and Networking/WDM Components, 2001. Digest of the LEOS Summer Topica
Conference_Location :
Copper Mountain, CO, USA
Print_ISBN :
0-7803-7100-3
DOI :
10.1109/LEOSST.2001.941923
