DocumentCode :
3355599
Title :
Solving Problems In Semiconductor Technology Using Optical Characterization Techniques
Author :
Simard-Normandin, Martine
Author_Institution :
Northern Telecom Electronics Limited
fYear :
1990
fDate :
4-9 Nov 1990
Firstpage :
584
Lastpage :
587
Keywords :
Contamination; Microelectronics; Optical microscopy; Optical modulation; Particle beam optics; Raman scattering; Silicon on insulator technology; Spectroscopy; Tin; Vibration measurement;
fLanguage :
English
Publisher :
ieee
Conference_Titel :
Lasers and Electro-Optics Society Annual Meeting, 1990. LEOS '90. Conference Proceedings., IEEE
Print_ISBN :
0-87942-550-4
Type :
conf
DOI :
10.1109/LEOS.1990.690687
Filename :
690687
Link To Document :
https://search.ricest.ac.ir/dl/search/defaultta.aspx?DTC=49&DC=3355599
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